Intelligente Gassensoren (IGS). Integrierte Intelligente Metalloxid-Gassensorsysteme Abschlussbericht

Gas sensor arrays with SnO_2 as an active material were developed on Si and sapphire substrates. The sensitivity and selectivity were varied applying design and technology parameters. Solid-state physics interpretations of sensor effects are suggested. The chemico-analytical properties are analyzed applying a newly set-up gas measuring technique. Multivariate analytical methods and pattern recognition methods are successfully applied to high-purity gas mixtures and to olfactometric problems. (orig.)SIGLEAvailable from TIB Hannover: RO 7155(1996,13)+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman