Duennschichttechnologische Erforschung und physikalisch-chemische Charakterisierung organischer und metallorganischer Schichten in Wechselwirkung mit technischen Gasen. Teilvorhaben: Entwicklung der Duennschichttechnologie (Design, Schichtabfolge, Prozesse) zur Erzeugung organischer und metallorganischer Schichten und elektrische Vermessung der Schichten in Wechselwirkung mit technischen Gasen Abschlussbericht

Organic and organometallic layers were applied to different measuring structures by means of spin-on, PECVD and cathodic sputtering methods, and their interaction with industrial gases was investigated. The physical effects (changes in the dielectric constants, the surface density, or optical refractive index) were measured by means of planar interdigital condensers, surface density sensors and integrated optical interferometers. It was shown that gases which contain ethanol, toluene, chloroform and perchloroethylene cause different physical effects in the layers, and that the individual mixed-gas components can be detected separately applying different measuring principles and materials. The method described is basically suited for process and pollution monitoring uses. (orig.)Available from TIB Hannover: F94B1471+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman