The work was finished at the 31.12.1992. It was the aim to develope position-drives for the micrometer- and submicrometer range based on piezoeffect and electromagnetic effect. Besides theoretical considerations being built actuators, dynamic voltage sources and controlers are investigated. Piezoactuators are suited for positioning tasks in the Nanometer-range. Maximum trail is about 50...100 #mu#m. Electromagnetic screw-thread reluctance motor (SGRM) are suited for trails of several 100 mm, speeds till 1 m/s and position accuracy of 100 Nanometers. The fields of application are for the piezoactuator scanners for tunnel-microscopes. The SGRM is applicable for handling- and robot-devices to simplify mechanisms and for tool-machines for proce...
Piezo-electric motors have been successfully developed for various applications like autofocus drive...
This diploma thesis deals with the production and testing of MEMS devices intended for micromanipula...
International audience"Piezoelectric actuators are widespread in the design of micro/nanorobotic too...
This short study shows that in the European area high efforts are made to develop more and more prec...
We developed a 3-axis fine positioning device, based on piezo-inertia drive technology for operation...
This thesis is focused on selected kinds of piezoengines and their ability to control and follows th...
Microsystems, consisting of integrated circuits (IC, CMOS), microsensors such as microactuators, can...
The research described in this thesis is focused on the development of microactuators, which are req...
This bachelor’s thesis main concern is to develop and optimize a linear impact-drive piezoelectric a...
The Micro Harmonic Drive ® gear is now established in the precision machine market as an ideal solut...
[[abstract]]This paper proposes a novel 3-DOFs positioner system with large travel ranges is present...
This diploma thesis describes the piezoelectric phenomenon and its use for positioning with nanometr...
The work deals with the design, control, precision and dynamics of linear piezoelectric motors from ...
Micro-positioning systems using piezoelectric actuators have a very wide range of applications inclu...
International audience"Piezoelectric actuators are widespread in the design of micro/nanorobotic too...
Piezo-electric motors have been successfully developed for various applications like autofocus drive...
This diploma thesis deals with the production and testing of MEMS devices intended for micromanipula...
International audience"Piezoelectric actuators are widespread in the design of micro/nanorobotic too...
This short study shows that in the European area high efforts are made to develop more and more prec...
We developed a 3-axis fine positioning device, based on piezo-inertia drive technology for operation...
This thesis is focused on selected kinds of piezoengines and their ability to control and follows th...
Microsystems, consisting of integrated circuits (IC, CMOS), microsensors such as microactuators, can...
The research described in this thesis is focused on the development of microactuators, which are req...
This bachelor’s thesis main concern is to develop and optimize a linear impact-drive piezoelectric a...
The Micro Harmonic Drive ® gear is now established in the precision machine market as an ideal solut...
[[abstract]]This paper proposes a novel 3-DOFs positioner system with large travel ranges is present...
This diploma thesis describes the piezoelectric phenomenon and its use for positioning with nanometr...
The work deals with the design, control, precision and dynamics of linear piezoelectric motors from ...
Micro-positioning systems using piezoelectric actuators have a very wide range of applications inclu...
International audience"Piezoelectric actuators are widespread in the design of micro/nanorobotic too...
Piezo-electric motors have been successfully developed for various applications like autofocus drive...
This diploma thesis deals with the production and testing of MEMS devices intended for micromanipula...
International audience"Piezoelectric actuators are widespread in the design of micro/nanorobotic too...