Abscheidung neuartiger Hartstoffschichtsysteme durch Zersetzung von metallorganischen Verbindungen Abschlussbericht

For the deposition of wear resistant refractory materials on steel- and metal-surfaces by CVD-technique high temperature over 700 C is required. The disadvantageous high temperature as regards PVD-technique is necessary to evaproate the halides of the IV - VI group metals, to which the main suitable source materials are limited. On the other hand, metal organic cpds are significantly volatile and in addition they can be 'tailored' as optional source materials for a CVD-technique at significantly low-temperature. This project as a preliminary survey had in laboratory experiments to estimate, whether organic cpds may form a coating of any refractory material by plasma assisted thermal cvd-processing. The observed deposition of remaining film like titanium and zirconium composites confirms the supposed formation of coating. However, further investigations are necessary to decide, how far such layers can be applied as protective coating especially for tribotechnical application. (orig.)SIGLEAvailable from TIB Hannover: F95B1966+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman