Intelligente Werkzeuge durch integrierte Mikrosysteme-INGWER Abschlussbericht

The task of this scientific pre-project INGWER was related to investigations in the field of microsystem and coating technology with the aim of proving the realization of smart tools. To this novel thin film sensors have been integrated in wear resistant coatings for inserts. As a result of this, direkt measurement of temperatur and wear taken right at the centre of maximum load during turning operations have been performed. For on-line signal generation and transfer micro contacts have been used in combination with a microelectronic circuit adapted to the shaft of the lathe tool. For the realization of the sensor networks commercial inserts have been used which were coated with 3-8 #mu#m thick films of Al_2O_3 and on top of that with films of 0,5 #mu#m thickness for the sensor layer. For structuring of the sensor level photolithographic techniques as well as direct writing and masks based laser techniques have been investigated successfully. The electric circuits elements as well as the sensors were fabricated by using only one layer. Results with good perspectives have been obtained with CrNi and CrN. The layer system was continued by sputtering an Al_2O_3 layer next to the sensor level. The microsystem fabricated by means of the discribed techniques was tested by running turning processes of aluminium alloys. It turned out, that depending on the turning parameters, temperatures in the centre of the crater wear area between 200 C and 400 C have been measured. Tests performed with workpices of steel CK45 showed, that the wear resistance of the sensor integrated coating must be improved in future. (orig.)SIGLEAvailable from TIB Hannover: F99B1529+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman