Ionenstrahlbearbeitung von optischen Oberflaechen - Umsetzung in die industrielle Praxis Schlussbericht

Reactive ion beam treatment of glas and flourspar surfaces was carried out using a broad beam ion source of the Kaufman type. Beam modulation was realized by transparent metal masks or by rotating form screens after an extension error analysis on masks and screens. The range of potential method applications in the optical industry has been demonstrated by several examples: (i) Improving the roughness of a CaF_2 lens (103 mm diameter) from 3.38 to 0.49, (ii) correcting the surface error at a completely mounted interferometer objective, (iii) correcting the defect of polish at a flourspar lens (70 mm diameter) from a peak to valley value of 120 nm to 47 nm, (iv) etching the pattern of a micro lenses array with refractive individual lenses (3 #mu#m diameter) into quark, and (v) constructing the prototype of an apochromatic telescope objective with short focal length. (WEG)SIGLEAvailable from TIB Hannover: F96B959+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman