Atomic and molecular emission spectroscopy in low temperature plasmas containing hydrogen and deuterium

Fantz, U.
Max-Planck-Institut fuer Plasmaphysik, Garching (Germany)
Augsburg Univ. (Germany). Mathematisch-Naturwissenschaftliche Fakultaet

Publication date

January 2002

Abstract

In this thesis plasma diagnostics by emission spectroscopy is reviewed. Considered are He, Ar, H_2, D_2, CH_4, silane, N_2, and O _2 plasmas. (HSI)SIGLEAvailable from TIB Hannover: RA 71(10/21) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman

Extracted data

We use cookies to provide a better user experience.

Data Protection

Atomic and molecular emission spectroscopy in low temperature plasmas containing hydrogen and deuterium

Abstract

Extracted data

Atomic and molecular emission spectroscopy in low temperature plasmas containing hydrogen and deuterium

Abstract

Extracted data

Related items

Related items