Photothermische Oberflaechenuntersuchung von Feststoffen

In this paper, we describe the examination of solide surfaces by using the transverse photothermal beam deflection technique in the adjacent air medium. The results of the measure and the graphic presentation of the results are compared with the theory and the photographic enlargement of the surfaces. The examination material are sputtered surfaces with different material and different structures. These are one chrom-assay and two natrium-aluminium-silicat assays. These assays have surface damages between 74 nm and #mu#m-range. We use two probe beam laser (wavelength 472 nm and 1064 nm). We investigate the influence of modulation frequency and laser beam intensity on the measure signal and we found a clear dependence. The detection limit of this measure system is between 50 and 100 nm. This paper describes obviously, that we get deep-profile from the examinated probe with this apparatus without any destruction of the sample. (orig.)SIGLEAvailable from TIB Hannover: ZA 5141(5202) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman