Charakterisierung optischer Oberflaechen ueber ihre Mikrorauheit unter Einsatz interferometrischer, taktiler und streuender Messverfahren

Both classical polishing processes and modern technologies such as ion beam technology were developed and used to prepare superpolished surfaces and special optical components e.g. UV-lenses. The produced surfaces were characterized using different texture measurement systems. The surface parameters were determined using the mechanical profiler Nanostep (Rank Taylor Hobson), the Optical Heterodyne Profiler Z5500 (Zygo), and Atomic Force Mircoscope (Digital Instruments), an ARS and a TIS laboratory equipment. All of these instruments are band-limited. Under well-known measuring conditions and well-selected band limitation roughness correlation measurements had been carried out. It is demonstrated that the correlation of R_q between the optical and the mechanical profiler is well under the selected band limitation. (orig.)SIGLEAvailable from TIB Hannover: RA 2999(96-03) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman