Laser generated plasmas emit electromagnetic radiation. Choosing appropriate laser and target parameters, the maximum emission can be placed in the soft X-ray region. In order to develop powerful laboratory X-ray sources utilizing laser generated plasmas, the characterisation of their spectral emission is desired. To be able to do so, X-ray spectrographs have been set up in the frame of this research project, based on novel, especially developed X-ray optics, so called Off-Axis Reflection zone plates (ORZs). Several ORZs have been manufactured using the electron beam lithography system that has been purchased from funds of this projects. Calibration of all components of the spectrograph allows for absolute measurements of the plasma emissio...
Recent developments in the theory of plasma-based collisionally excited x-ray lasers (XRL) have show...
4noIn this work, the characteristics of X-ray beam generated from a plasma produced by focusing a Nd...
A method is described to determine the soft X-ray emission of pulsed plasma sources for X-ray lithog...
Laser plasmas are intrinsically an attractive soft-x-ray source for projection lithography. Compact,...
The intensity and spectral characteristics of x-ray emitted from laser-produced plasmas have been in...
Laser pulses of 15 ns and less than 3 J at 1064 nm and less than 1.2 J at 532 nm were focused onto s...
Die vorliegenden Arbeit befasst sich mit der spektralen Charakterisierung der Röntgenemission aus la...
In this work the results of the development of an electron source, based on the emission of free ele...
In this work high repetition rate femtosecond laser pulse driven x-ray plasma sources, created in an...
With the development of EUV lithography there is an increasing need for high-accuracy at-wavelength ...
An experimental investigation on X-ray emission from laser-produced plasmas is presented and the pro...
This report is an experimental study of the conversion af laser light into x-rays in a hohlraum targ...
We present an experimental study of hard x rays produced in laser-produced plasmas. The laser used i...
Up to now X-ray lasers could be realized only at a few places worldwide and with extraordinary cost,...
Process for emission spectroscopy, in particular laser emission spectroscopy, in which radiation (40...
Recent developments in the theory of plasma-based collisionally excited x-ray lasers (XRL) have show...
4noIn this work, the characteristics of X-ray beam generated from a plasma produced by focusing a Nd...
A method is described to determine the soft X-ray emission of pulsed plasma sources for X-ray lithog...
Laser plasmas are intrinsically an attractive soft-x-ray source for projection lithography. Compact,...
The intensity and spectral characteristics of x-ray emitted from laser-produced plasmas have been in...
Laser pulses of 15 ns and less than 3 J at 1064 nm and less than 1.2 J at 532 nm were focused onto s...
Die vorliegenden Arbeit befasst sich mit der spektralen Charakterisierung der Röntgenemission aus la...
In this work the results of the development of an electron source, based on the emission of free ele...
In this work high repetition rate femtosecond laser pulse driven x-ray plasma sources, created in an...
With the development of EUV lithography there is an increasing need for high-accuracy at-wavelength ...
An experimental investigation on X-ray emission from laser-produced plasmas is presented and the pro...
This report is an experimental study of the conversion af laser light into x-rays in a hohlraum targ...
We present an experimental study of hard x rays produced in laser-produced plasmas. The laser used i...
Up to now X-ray lasers could be realized only at a few places worldwide and with extraordinary cost,...
Process for emission spectroscopy, in particular laser emission spectroscopy, in which radiation (40...
Recent developments in the theory of plasma-based collisionally excited x-ray lasers (XRL) have show...
4noIn this work, the characteristics of X-ray beam generated from a plasma produced by focusing a Nd...
A method is described to determine the soft X-ray emission of pulsed plasma sources for X-ray lithog...