Neue Quellen fuer die Gasphasenepitaxie. Teilbereich: Schichtstrukturen fuer Detektoren. Teilvorhaben: Wachstum von Schichtstrukturen fuer Detektoren und OEIC mit alternativen Gruppe-V-Quellen Schlussbericht

As part of the main point of support 'alternative precursors for the vapour phase epitaxy' we have investigated the usability of the metalorganic (MO) precursors tertiarybutylphosphine (TBP) and tertiarybutylarsine (TBAs) for the MOVPE process. The present standard precursors PH_3 and AsH_3 are highly toxic, thermally stable and have a high vapour pressure. In contrast, the metalorganics are liquids with low vapour pressures and in addition they are less toxic and less stable. So the use of these precursors can strongly reduce the risk potential of the MOVPE process. Beside, the consumption of TBP, TBAs can be reduced considerably, compared to that of the standard hydrides, due to the more effective decomposition during the growth process. This results in a reduced amount of toxic residual gases, which have to be removed in a scrubber unit. The disposal of the toxic waste is an unneglectable cost and time factor in industrial production. For the material system InP/InGaAs it was shown in typical MOVPE growth processes (selective epitaxy, overgrowth, doping, PIN detectors), that the switching from standard hydrides to the MO precursors can be done without causing trouble. Essentially it was demonstrated, that the growth mechanisms using TBP and TBAs were the same as using the hydrides. Therefore the replacement of PH_3 and AsH_3 with TBP, TBAs only result in advantages from the point of view of the growth process. For the industrial acceptance of the new precursors it will be finally nececsary, that the precursor manufacturer will be able to produce TBP and TBAs reproducible in adequate quantities and qualities. In addition extended investigations have to be done to demonstrate the usability of the MO precursors in Al containing material systems (oxygen and carbon problem). (orig.)Available from TIB Hannover: DtF QN1(60,11) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman