Entwicklung und Charakterisierung elektronischer Bauelementstrukturen auf der Basis einkristalliner CoSi_2/Si(100)-Heterostrukturen und sub-#mu#m-Strukturierung dieses Schichtsystems durch lokale Oxidation

The fabrication process of a light emitting diode (LED)-array with porous silicon (PS) was investigated. The fundamental idea was to control the electroluminescence (EL) of a continuous PS-layer locally by an array of vertical metal-semiconductor-feld-effect-transis tors (MESFETs) based on single crystalline Si/CoSi_2/Si(100)-heterostructures. The LED-array consists of two crossed stripe-gratings buried in a silicon substrate with a continuous PS-layer on top. One grating acts as source-, the other one as gate- and the PS-layer as drain-electrode of the transistor. Secondary ion mass spectroscopy and channeling measurements have shown that highly conducting source-gratings in intrinsic silicon substrate can be fabricated by implantation of phosphorous through a SiO_2-mask. The gate-grating was fabricated by implantation of cobalt ions through a mask perpendicular to the source-stripe-grating and subsequent annealing (ion beam synthesis, IBS). The current-voltage characteristic of the source and gate-electrode have proven the compatibility of phosphorous-implantation and IBS of CoSi_2. The compatibility of IBS with the electrolytic formation of porous silicon was demonstrated by the observed EL of porous silicon on buried CoSi_2-layers. In addition, a novel patterning method for single crystalline CoSi_2-layers on silicon based on local oxidation of the silicide was developed and optimized. The local oxidation of thin CoSi_2-layers was investigated in detail. A strong dependence of the patterning process on the silicide layer thickness as well as on the orientation of the oxidationmask was observed. The new process allows the patterning of 100 nm wide gaps between two metallic contacts by use of standard optical lithography. (orig.)121 refs.Available from TIB Hannover: RA 831(3446) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman