This short study shows that in the European area high efforts are made to develop more and more precisely working drives and products based on the same. In the process it is shown that piezoelectric, electrostrictive, electrostatic and magnetostrictive drive principles are utilized to an increasing extent to ensure positioning accuracies down to the nanometer range. But also conventional motor, hydrostatic and purely mechanical drive principles are capable of reaching positioning errors of less than one #mu#m. The product range in which highly accurate precision drives are used is very versatile. Applications primarily include optics, production of precision and very small components, production of electronic circuits, precision measurement...
Motion drive system has been developed for use with interferometers where accurate control of minusc...
[[abstract]]This paper proposes a novel 3-DOFs positioner system with large travel ranges is present...
Piezo-electric motors have been successfully developed for various applications like autofocus drive...
The work was finished at the 31.12.1992. It was the aim to develope position-drives for the micromet...
Precise positioning over a long stroke is required in various fields. Important advances in the fiel...
When assembling micro-optical instruments, a goal is the positioning of the elements with permissibl...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
Based on different drive ideas, two nanometer-level positioning tables have been studying. At presen...
Based on different drive ideas, two nanometer-level positioning tables have been studying. At presen...
We developed a 3-axis fine positioning device, based on piezo-inertia drive technology for operation...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
An effective and universally useful means of adjustment in the realm of precision engineering and op...
Modern positioning systems are significantly applied in many engineering fields dealing with product...
Motion drive system has been developed for use with interferometers where accurate control of minusc...
[[abstract]]This paper proposes a novel 3-DOFs positioner system with large travel ranges is present...
Piezo-electric motors have been successfully developed for various applications like autofocus drive...
The work was finished at the 31.12.1992. It was the aim to develope position-drives for the micromet...
Precise positioning over a long stroke is required in various fields. Important advances in the fiel...
When assembling micro-optical instruments, a goal is the positioning of the elements with permissibl...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
Based on different drive ideas, two nanometer-level positioning tables have been studying. At presen...
Based on different drive ideas, two nanometer-level positioning tables have been studying. At presen...
We developed a 3-axis fine positioning device, based on piezo-inertia drive technology for operation...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
An effective and universally useful means of adjustment in the realm of precision engineering and op...
Modern positioning systems are significantly applied in many engineering fields dealing with product...
Motion drive system has been developed for use with interferometers where accurate control of minusc...
[[abstract]]This paper proposes a novel 3-DOFs positioner system with large travel ranges is present...
Piezo-electric motors have been successfully developed for various applications like autofocus drive...