The impressive development of focused ion beam (FIB) systems from the laboratory level to high performance industrial machines during the last twenty years is briefly reported. The design and the functional principle of a liquid metal ion source as well as a FIB column are described. Main application fields of the FIB technology are stoichiometric writing implantation or ion milling which are dominated by the sputtering effect. The FIB is a very suitable tool for sputtering of well defined holes which can easily be analysed by surface profiling. By applying this volume loss method the sputtering yields and milling rates of crystalline, amorphous, and poly-silicon, as well as SiO_2, CVD- and high pressure (HP) - diamond and 6H:SiC were inves...
Fabrication of micro and nanoscale components are in high demand for various applications in divers...
Focused ion beam (FIB) is a tempting maskless rapid direct writing technique for modifying and debug...
© 2020, Pleiades Publishing, Ltd. Abstract: We report on the results of first practical observations...
The impressive development of focused ion beam (FIB) systems from the laboratory level to high perfo...
The impressive development of focused ion beam (FIB) systems fiom the laboratory level to high perfo...
The impressive development of focused ion beam (FIB) systems from the laboratory level to high perfo...
This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication....
In this paper the possibilities of focused ion beam (FIB) applications in microsystem technology are...
Focused Ion Beam (FIB) is an important analytical and sample modification technique in the field of ...
Focused Ion Beam (FIB) is an important analytical and sample modification technique in the field of ...
Focused ion beams (FIB) have drawn considerable interest as a tool for micromachining in the sub-mic...
Focused ion beam (FIB) have drawn considerable interest as a tool for micromachining in the sub-micr...
Focused Ion Beams (FIB) are widely used in the semiconductor industry for milling, sputtering and im...
Focused Ion Beams (FIB) are widely used in the semiconductor industry for milling, sputtering and im...
Focused ion beam (FIB) is a tempting maskless technique for modifying and debugging microcircuit. In...
Fabrication of micro and nanoscale components are in high demand for various applications in divers...
Focused ion beam (FIB) is a tempting maskless rapid direct writing technique for modifying and debug...
© 2020, Pleiades Publishing, Ltd. Abstract: We report on the results of first practical observations...
The impressive development of focused ion beam (FIB) systems from the laboratory level to high perfo...
The impressive development of focused ion beam (FIB) systems fiom the laboratory level to high perfo...
The impressive development of focused ion beam (FIB) systems from the laboratory level to high perfo...
This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication....
In this paper the possibilities of focused ion beam (FIB) applications in microsystem technology are...
Focused Ion Beam (FIB) is an important analytical and sample modification technique in the field of ...
Focused Ion Beam (FIB) is an important analytical and sample modification technique in the field of ...
Focused ion beams (FIB) have drawn considerable interest as a tool for micromachining in the sub-mic...
Focused ion beam (FIB) have drawn considerable interest as a tool for micromachining in the sub-micr...
Focused Ion Beams (FIB) are widely used in the semiconductor industry for milling, sputtering and im...
Focused Ion Beams (FIB) are widely used in the semiconductor industry for milling, sputtering and im...
Focused ion beam (FIB) is a tempting maskless technique for modifying and debugging microcircuit. In...
Fabrication of micro and nanoscale components are in high demand for various applications in divers...
Focused ion beam (FIB) is a tempting maskless rapid direct writing technique for modifying and debug...
© 2020, Pleiades Publishing, Ltd. Abstract: We report on the results of first practical observations...