Grobvakuum-Hohlkatoden-Beschichtung Abschlussbericht

The project served the development of the basics of a new coating process based on a hollow cathode discharge and clarifying of possibilities of an industrial application with the subtasks source optimization (IST) and testing in an experimental coil coating system. Goal was the achievement of high layer growth rates with equivalence of the layer characteristics with those of other coating processes. Due to the determined data further estimations were made to the economy. The experiments were realized for aluminium and alumina layers. For the proof of the suitability for a coil coating process a test plant was modified accordingly. It was shown that the results of the hollow cathode discharge concerning the deposition rates and reflectance of Al coating cannot compete to the results of magnetron sputtering. A clarifying concerning this could not be completed. In advance of an industrial application furthermore optimization of the source is necessary. Better results were obtained when sputtering of aluminia layers which suggest applications rather directed to the oxide coatings. The metallic mode of the targets affects the process favourablySIGLEAvailable from TIB Hannover: F99B992+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman