Auswertung von Fizeau-Interferenzen mit Hilfe der Phasenverschiebungsinterferometrie

For the evaluation of Fizeau interferences, in this thesis a new algorithm is developed by which precise results are obtained up to the subnano region. This special four-step algorithm requires a variation of the phase difference between the recording of the interference pictures. On this basis a phase-shifting interferometer was constructed by which measurements of the topography of Fabry-Perot plates can be realized with a standard deviation of about #lambda#/3000. (WEN)SIGLEAvailable from TIB Hannover: RA 3254(41) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman