Plasma technology of conversion of silicon tetrafluoride to dispersed silicon oxide and hydrofluoric acid

Tumanov, Y.
Kobzar, Y.F.
Kuz'min'kh, S.
Riecansky (V.E.) Technical Translations, Cambridge (United Kingdom)

Publication date

January 2000

Abstract

Translated from Russian (Fiz. Khim. Obra. Mater. 1996 (5) p. 27-32)SIGLEAvailable from British Library Document Supply Centre-DSC:9023.190(9351)T / BLDSC - British Library Document Supply CentreGBUnited Kingdo

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Plasma technology of conversion of silicon tetrafluoride to dispersed silicon oxide and hydrofluoric acid

Abstract

Extracted data

Plasma technology of conversion of silicon tetrafluoride to dispersed silicon oxide and hydrofluoric acid

Abstract

Extracted data

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