Nanofabrication of magnetic scanned-probe microscope sensors

This thesis presents the development of novel magnetic sensor combined with Atomic Force Microscope probe (AFM) using conventional semiconductor processing techniques and Electron Beam Lithography (EBL). The fabrication of these magnetic sensors was performed on a common micromachined silicon substrate using a generic batch fabrication technique. Sub-micron Hall bar for Scanning Hall probe Microscopy (SHPM) and electromagnetic force coil magnet for Scanning Electromagnetic Force Microscopy (eMFM) were designed and constructed at the apex of Silicon attractive mode cantilever probes. The process demonstrates good control over sensor parameters. Results indicated controllability of Hall bar junction sizes (spatial resolution) to below 100nm and Coil diameter sizes to below 500nm with minimum sizes down to 50nm and 270nm respectively. The process has shown its flexibility to accommodate different material systems. The same technology was used to fabricate multiple devices such as double Hall bars on a tip as well as a small electro-magnet coil probe co-defined with the Hall probe to form a magnetic imaging / modification probe. A conventional Non-Contact mode AFM employing heterodyne interferometry and in-house built electronics was modified for SHPM and eMFM. These probes had been scanned over a commercial computer hard disk. These microscopes showed the capability of resolving magnetic bits and topographic information independently and simultaneously. All scanning experiments were carried out under ambient conditions. The experiments required no extra preparation to be done to the specimen before imaging and measurements were carried out under ambient conditions. These probes offer the prospect of direct magnetic field measurement, non- invasiveness, very close proximity, possible local manipulation, better control over the tip- specimen interaction distance and topographic imaging. It is hoped that these magnetic microscope probes will be of great interest and general utility for academic and industrial magneticians. (author)SIGLEAvailable from British Library Document Supply Centre-DSC:DXN052196 / BLDSC - British Library Document Supply CentreGBUnited Kingdo