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Studies of plasmas used for semiconductor etching

Sucksmith, J.P

Publication date

January 1993

Abstract

SIGLEAvailable from British Library Document Supply Centre- DSC:D177838 / BLDSC - British Library Document Supply CentreGBUnited Kingdo

Extracted data

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SIGLELD:f82/1363. / BLDSC - British Library Document Supply CentreGBUnited Kingdo

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SIGLEAvailable from British Library Document Supply Centre- DSC:DX89012 / BLDSC - British Library Do...

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SIGLEAvailable from British Library Lending Division - LD:D52533/84 / BLDSC - British Library Docume...

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January 1995

SIGLEAvailable from British Library Document Supply Centre-DSC:D197896 / BLDSC - British Library Doc...

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Leyland, A

January 1991

SIGLEAvailable from British Library Document Supply Centre- DSC:DX180265 / BLDSC - British Library D...

Electrical and optical studies of semiconductor devices and materials

Payling, C.A

January 1988

SIGLEAvailable from British Library Document Supply Centre- DSC:D84710 / BLDSC - British Library Doc...

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SIGLEAvailable from British Library Document Supply Centre- DSC:D90334 / BLDSC - British Library Doc...

A study of microwave induced plasmas

Burke, P.E
Polytechnic of North London (United Kingdom)
Council for National Academic Awards (CNAA), London (United Kingdom)

January 1987

SIGLEAvailable from British Library Document Supply Centre- DSC:D74694/87 / BLDSC - British Library ...

Surface studies on semiconductor processing and related phenomena

Murrell, A.J

January 1990

SIGLEAvailable from British Library Document Supply Centre- DSC:D92667 / BLDSC - British Library Doc...

A study of semiconductor superlattices

Owen, C

January 1981

SIGLEAvailable from British Library Document Supply Centre- DSC:D37978/81 / BLDSC - British Library ...

Studies of laser generated plasmas relevant to soft X-ray laser research

Corbett, R.E

January 1987

SIGLEAvailable from British Library Document Supply Centre- DSC:DX91839 / BLDSC - British Library Do...

Plasma accelerators

Bingham, R.
De Angelis, U.
Johnston, T
Science and Engineering Research Council (SERC), Chilton (United Kingdom). Rutherford Appleton Lab

January 1991

SIGLEAvailable from British Library Document Supply Centre- DSC:8053.4153(RAL--91-002) / BLDSC - Bri...

A study of reactive sputter etching by directed ion beams and RF plasmas

Revell, P
Middlesex Polytechnic, London (United Kingdom)
Council for National Academic Awards (CNAA), London (United Kingdom)

January 1982

SIGLEAvailable from British Library Document Supply Centre- DSC:D41689/82 / BLDSC - British Library ...

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Trevellick, P.R

January 1985

SIGLEAvailable from British Library Document Supply Centre- DSC:D69065/86 / BLDSC - British Library ...

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Batchelor, R

January 1991

SIGLEAvailable from British Library Document Supply Centre- DSC:D79676 / BLDSC - British Library Doc...

Film preparation and etching by plasma technology Summaries of contributions

Sira Institute Ltd., Chislehurst (UK)

January 1981

SIGLELD:f82/1363. / BLDSC - British Library Document Supply CentreGBUnited Kingdo

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Maani, C

January 1988

SIGLEAvailable from British Library Document Supply Centre- DSC:DX89012 / BLDSC - British Library Do...

A study of silicon layers by the plasma-spraying technique

Alaee, M.S
Brunel Univ., Uxbridge (United Kingdom)

January 1984

SIGLEAvailable from British Library Lending Division - LD:D52533/84 / BLDSC - British Library Docume...