Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)International audienceIn this paper, the bulge test is used to determine the mechanical properties of very thin dielectric membranes. Commonly, this experimental method permits to determine the residual stress (s0) and biaxial Young’s modulus (E/(1-u)). Associating square and rectangular membranes with different length to width ratios, the Poisson’s ratio (u) can also be determined. LPCVD Si3N4 monolayer and Si3N4/SiO2 bilayer membranes, with thicknesses down to 100 nm, have been characterized giving results in agreement with literature for Si3N4, E = 212 ± 14 GPa, s0 = 420 ± 8 and u = 0.29
The Poisson's ratio and residual strain of ultra-thin films (<100 nm) are characterized using the ph...
Si3N4 is a material widely used in MEMS technology. Its high mechanical strength makes Si3N4 attract...
A general computational method is introduced to estimate the Poisson’s ratio for membranes with smal...
In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric...
The aim of this work is to compare several methods for the determination of very thin films Young's...
International audienceThe aim of this work is to compare several methods for the determination of ve...
Ultra-thin membranes find an increasing amount of applications within the high-tech sector to obtain...
Buckled membranes become ever more important with further miniaturization and development of ultra-t...
This paper aims at determining the mechanical properties such as Poisson ratio, biaxial modulus, and...
The bulge test apparatus designed for the measurement of mechanical material properties of thin film...
The Bulge test proved to be a useful tool for measuring elastic properties of thin films and\nfree s...
This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge t...
International audienceKnowledge of thin films mechanical properties is strongly associated to the re...
The theory and experimental approach for a new technique used to determine the Poisson`s ratio of th...
[[abstract]]Narrow micromachined bilayer cantilevers, which are broadly used to determine different ...
The Poisson's ratio and residual strain of ultra-thin films (<100 nm) are characterized using the ph...
Si3N4 is a material widely used in MEMS technology. Its high mechanical strength makes Si3N4 attract...
A general computational method is introduced to estimate the Poisson’s ratio for membranes with smal...
In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric...
The aim of this work is to compare several methods for the determination of very thin films Young's...
International audienceThe aim of this work is to compare several methods for the determination of ve...
Ultra-thin membranes find an increasing amount of applications within the high-tech sector to obtain...
Buckled membranes become ever more important with further miniaturization and development of ultra-t...
This paper aims at determining the mechanical properties such as Poisson ratio, biaxial modulus, and...
The bulge test apparatus designed for the measurement of mechanical material properties of thin film...
The Bulge test proved to be a useful tool for measuring elastic properties of thin films and\nfree s...
This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge t...
International audienceKnowledge of thin films mechanical properties is strongly associated to the re...
The theory and experimental approach for a new technique used to determine the Poisson`s ratio of th...
[[abstract]]Narrow micromachined bilayer cantilevers, which are broadly used to determine different ...
The Poisson's ratio and residual strain of ultra-thin films (<100 nm) are characterized using the ph...
Si3N4 is a material widely used in MEMS technology. Its high mechanical strength makes Si3N4 attract...
A general computational method is introduced to estimate the Poisson’s ratio for membranes with smal...
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