Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AlN films that is sandwiched between two metallic electrodes. The thicknesses of AlN and diamond layers are 1μm and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that ...
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We inn...
This paper reports the first implementation of ultra thin (100 nm) Aluminum Nitride (AlN) piezoelect...
This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN) piezoelectric la...
AbstractMicro-cantilevers can be used as both sensors and actuators. In this work, the design, fabri...
Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication a...
Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III...
In this work, we present a proof-of-concept for the modulation of field emission currents from boron...
Unimorph heterostructures based on piezoelectric aluminum nitride (AlN) and diamond thin films are h...
The properties of diamond make it an attractive material for MEMS and sensor devices. We present the...
Very good crystallinity and highly c-axis-oriented aluminum nitride (AlN) thin films are sputtered o...
Boron-doped nanocrystalline diamond (NCD:B) elastic layers combined with aluminum nitride (AlN) piez...
The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) fi...
A great potential of the use of aluminum nitride (AlN) to enhance the actuation of nanocrystalline d...
Nanocrystalline diamond (NCD) due its outstanding thermal, mechanical and tribological properties is...
Actuation enhancement for AlN piezoelectric cantilevers is achieved by coating slender AlN beams wit...
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We inn...
This paper reports the first implementation of ultra thin (100 nm) Aluminum Nitride (AlN) piezoelect...
This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN) piezoelectric la...
AbstractMicro-cantilevers can be used as both sensors and actuators. In this work, the design, fabri...
Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication a...
Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III...
In this work, we present a proof-of-concept for the modulation of field emission currents from boron...
Unimorph heterostructures based on piezoelectric aluminum nitride (AlN) and diamond thin films are h...
The properties of diamond make it an attractive material for MEMS and sensor devices. We present the...
Very good crystallinity and highly c-axis-oriented aluminum nitride (AlN) thin films are sputtered o...
Boron-doped nanocrystalline diamond (NCD:B) elastic layers combined with aluminum nitride (AlN) piez...
The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) fi...
A great potential of the use of aluminum nitride (AlN) to enhance the actuation of nanocrystalline d...
Nanocrystalline diamond (NCD) due its outstanding thermal, mechanical and tribological properties is...
Actuation enhancement for AlN piezoelectric cantilevers is achieved by coating slender AlN beams wit...
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We inn...
This paper reports the first implementation of ultra thin (100 nm) Aluminum Nitride (AlN) piezoelect...
This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN) piezoelectric la...