Magnetic MEMS actuators

Magnetic MEMS actuators are presently still relatively under-researched as compared to their electrostatic, piezoelectric and electro-thermal counterparts. Most existing magnetic MEMS actuators are limited to simply delivering a rotational output. The research presented in this thesis aims to develop novel magnetic MEMS actuators with complex structures that are capable of delivering more sophisticated and useful mechanical outputs than the existing devices. The study begins with an attempt to solve the problem of bending a freestanding ferromagnetic cantilever beam with an applied magnetic field. Analytical and numerical models have been constructed and the modelling results are compared to experimental results obtained from a microscopic and a laser measurement system. NiFe alloy has been used as both the magnetic and mechanical element. The magnetic and mechanical properties of electroplated NiFe have been experimentally characterized. Fabrication processes for creating freestanding NiFe structures have been designed and optimized via a parametric experimental study. Finally, novel ferromagnetic microstructures have been designed by combining the motions of more than one ferromagnetic beam. Preliminary magnetic actuation tests have been carried out in order to verify the design ideas.EThOS - Electronic Theses Online ServiceGBUnited Kingdo