From EBIC Images to Qualitative Minority Carrier Diffusion Length Maps

International audienceA novel method is presented with the aim to perform minority carrier diffusion length map on cross-sectional samples. The method is based on one Electron-Beam Induced Current (EBIC) acquisition and on the analyze of the EBIC signal slope variation on each scanned points. This method is applied on a pinned photodiode array realized on a low doped silicon epitaxy, and the electron diffusion length map which is extracted is in good accordance with our expectation taking into account the doping distribution of the device. A TCAD simulation also confirms quantitatively the measured diffusion length map. Advantages and drawbacks of this method are discussed in this study