Mapping Solid Surfaces with a Raman Microprobe

By combining an optical microscope with a standard Raman scattering apparatus, information on the structure, composition, homogeneity, and stress state of solids can be obtained with one micron resolution. After a discussion of the advantages and implementation of the technique, we examine specific applications mostly taken from our own work dealing with laser-solid interactions. In particular, we examine the structural modifications produced during laser annealing of semiconductors and laser induced damage of thin films