A Robust Solution to the Super-Resolution Phase Problem in Scanning Transmission Electron Microscopy

From a set of images, each of poor resolution, recorded in a transmission microscope under many different incident angles of coherent illumination, it is possible to obtain wavelength-limited resolution even if there is a narrow aperture lying in the back-focal plane of the imaging lens. This is achieved by a deconvolution algorithm which retrieves the phase of the Fourier transform of the specimen. The method accounts for complex components in the transfer function of the lens, is not very sensitive to defocus and is remarkably resilient to noise. It may have important applications in overcoming the resolution limit in the scanning transmission electron microscope (STEM), where such data are readily available