A DC Voltage Reference Based on MEMS
- Kärkkäinen, Anu
- Awan, Shakil A.
- Oja, A.
- Kyynäräinen, Jukka
- Manninen, Antti
- Tisnek, Nikolai
- Seppä, Heikki
Publication date
January 2004
DOI Publisher
IEEE Institute of Electrical and Electronic EngineersAbstract
A micromechanical moving plate capacitor has been designed and fabricated for use as the key component in a DC voltage reference. The reference is based on the characteristic pull-in property of a capacitive MEMS device. New device design and characterization results are presente
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