The sampling of ions from an atmospheric pressure inductively coupled plasma for mass spectrometry (ICP-MS) with a supersonic nozzle and skimmer is shown to follow similar behavior found for neutral beam studies and for ion extraction from other plasmas and flames. In particular, highest ion beam intensity is found if the skimmer tip is close to the Mach disk and at a calculated skimming Knudsen number close to the recommended value of 1. Our ICP-MS instrument with an off-axis detector and conventional cylindrical electrostatic ion focusing in the transition flow regime gives intense count rates of 1-5 MHz per mg L(\u27-1) of analyte superimposed on a background of 1-10 kHz. The dependence of count rates for metal oxide and doubly charged i...