Spectroscopic diagnostic complex based on the magnetron sputtering device with a digital method of the data mining
- I.A., Afanasіeva
- S.N., Afanasiev
- N.A., Azarenkov
- V.V., Bobkov
- V.V., Gritsyna
- I.I., Okseniuk
- A.A., Skrypnyk
- D.I., Shevchenko
DOIAbstract
A diagnostic complex based on a magnetron sputtering device is proposed for studying a magnetron discharge plasma parameter by optical emission spectroscopy, using two spectroscopic systems: photographic and photoelectric. Software for digital processing of the obtained emission spectra is developed. The results obtained by the two spectroscopic systems are compared
Add to ORKG