Silicon photonic integration with subwavelength gratings
- Schmid, J. H.
- Cheben, P.
- Lapointe, J.
- Xu, D. -X.
- Janz, S.
- Vachon, M.
- Wang, S.
- Bock, P.
- Benedikovi\u10d, D.
- Halir, R.
- Ortega-Mo\uf1ux, A.
- Ramos, C. A.
- P\ue9rez, J. G. W.
- Molina-Fern\ue1ndez, I.
DOIAbstract
Subwavelength grating structures with a pitch smaller than the Bragg resonance length can be used for engineering the refractive index in silicon photonic waveguides. We discuss the principles, design, fabrication and applications of subwavelength nanostructures in silicon photonics and review our recent results on fiber-chip coupling structures, surface grating couplers, waveguide crossings, and athermal waveguides with a polymersilicon hybrid core.Peer reviewed: YesNRC publication: Ye
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