Improving geometric quality of laser machined parts using high-precision motion system dynamic performance analysis

Dynamic performance of the motion system is a key element for achieving the highest accuracy and precision from a particular laser micromachining system. This paper describes an analysis of the dynamic performance of a high-precision motion system and its relevance to the improvement in geometric quality of the machined parts. The dynamic and statistical parameters of motion are utilized to evaluate the dynamic performance of the entire motion system. Also, experimental results applied to high-laser micromachining allow significant improvements in the precision and quality of the machined parts. An example of a micromachined line pattern on a flexible circuit board is presented. Better geometric quality in machined parts with increased precision in the track width, from +/-2.20 \ub5m up to +/- 0.75 \ub5m was obtained. The results highlight sources of improvement in the part geometric quality and the laser micromachining process.Peer reviewed: YesNRC publication: Ye