DOIAbstract
It is shown that the results of lengthy Monte Carlo simulations for positron stopping profiles in multilayer systems can be reproduced accurately in the incident energy range 1\u201325 keV using a simple scaling model. This model takes into account the variation of mean implantation depth between layers and the backscattering effects of interfaces and represents a computation time saving of several orders of magnitude. This development is a significant step in the effort to make detailed multilayer defect profiling with positrons a practical possibility.NRC publication: Ye
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