Add to ORKGThis paper presents the design and fabrication of integrated micromachined inductors on silicon substrates. In order to reduce eddy currents in silicon substrates, bulk-micromachining technology is used to etch the silicon wafer. In this way, aluminum spiral micromachined inductors can achieve a quality factor Q of approximately 30 (0.6-2 nH @ 2-15 GHz). Also, the resistivity of the inductors material is discussed.Fundação para a Ciência e Tecnologia (FCT
Nowadays, as the demand for wireless communication continues to expand, the need for high quality (Q...
International audienceThis paper presents the design, fabrication, and characterization of micro pla...
The book addresses the critical challenges faced by the ever-expanding wireless communication market...
This paper presents the design and fabrication of integrated micromachined inductors on silicon subs...
The authors present a systematic study of the modelling, design, and fabrication of planar spiral in...
High-Q planar spiral inductors were fabricated by innovative micromachining processes based on sputt...
In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabr...
This letter presents a novel radio frequency (RF) inductor in a monolithic inductor-capacitor circui...
[[abstract]]A silicon micromachining method has been developed to fabricate on-chip high-performance...
Strong demand for wireless communication devices has motivated research directed toward monolithic i...
This paper documents the results of a study based on measurements of 240 microwave monolithic spiral...
A novel MEMS inductor consisting of a planar single crystalline silicon spiral with a copper surface...
This paper presents a novel on-chip inductor with a patterned ground shield inserted between the spi...
In this project, a micromachined inductor on silicon wafer is presented.Master of Science (Precision...
Silicon integrated circuit spiral inductors and transformers are finding wide ranging applications i...
Nowadays, as the demand for wireless communication continues to expand, the need for high quality (Q...
International audienceThis paper presents the design, fabrication, and characterization of micro pla...
The book addresses the critical challenges faced by the ever-expanding wireless communication market...
This paper presents the design and fabrication of integrated micromachined inductors on silicon subs...
The authors present a systematic study of the modelling, design, and fabrication of planar spiral in...
High-Q planar spiral inductors were fabricated by innovative micromachining processes based on sputt...
In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabr...
This letter presents a novel radio frequency (RF) inductor in a monolithic inductor-capacitor circui...
[[abstract]]A silicon micromachining method has been developed to fabricate on-chip high-performance...
Strong demand for wireless communication devices has motivated research directed toward monolithic i...
This paper documents the results of a study based on measurements of 240 microwave monolithic spiral...
A novel MEMS inductor consisting of a planar single crystalline silicon spiral with a copper surface...
This paper presents a novel on-chip inductor with a patterned ground shield inserted between the spi...
In this project, a micromachined inductor on silicon wafer is presented.Master of Science (Precision...
Silicon integrated circuit spiral inductors and transformers are finding wide ranging applications i...
Nowadays, as the demand for wireless communication continues to expand, the need for high quality (Q...
International audienceThis paper presents the design, fabrication, and characterization of micro pla...
The book addresses the critical challenges faced by the ever-expanding wireless communication market...