A novel strontium titanate-niobate (SrNbxTi1-xO3) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO2/Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNbxTi1-xO3 thin-film resistor has a high sensitivity within 30°C approx. 400°C. Specifically, there is a turning point at 320°C, above which the resistance sharply decreases due to ionic conduction. The a.c. characteristics are also investigated.link_to_subscribed_fulltex
In this work, thermal resistors based on a simple rectangular structure are fabricated on three kind...
International audienceWe investigate thin film resistive thermometry based on metal-to-insulator-tra...
Barium lanthanum titanate-niobate (Ba1-xLaxNbyTi1-yO3) film deposited on a SiO2/Si substrate by the ...
Ba0.8Sr0.2TiO3 thin films deposited on a SiO2/Si substrate by argon ion-beam sputtering technique ar...
Nb-doped Sr 0.98La 0.02TiO 3 thin-film resistor is fabricated on a SiO 2/Si substrate by argon ion-b...
This paper reports the application of test structures to the evaluation of tantalum nitride (Ta-N) a...
The opposite signs of the temperature coefficient of resistance (TCR) of two thin film materials, ti...
Spreading-resistance temperature (SRT) sensor on thin-film SOI is investigated with emphasis on its ...
Strontium titanate-niobate (SrNbxTi1-xO3) film deposited on a SiO2/Si substrate by the argon ion-bea...
Titanium nitride (TiN) thin film resistors (TFRs) have been fabricated by reactive sputter depositio...
Strontium lanthanum titanate (Sr1-xLaxTiO3) film deposited on a SiO2/Si substrate by the argon ion-b...
International audienceStructural and dielectric properties of thin films produced by reactive radiof...
Strontium titanate-niobate (SrNbxTi1-xO3) film deposited on SiO2/Si substrate by argon ion-beam sput...
In this study, commercial-grade NiCr (80 wt % Ni, 20 wt % Cr) and NiCrSi (55 wt % Ni, 40 wt % Cr, 5 ...
This paper presents a comprehensive study of sputtered TaN thin film resistor with a low resistivity...
In this work, thermal resistors based on a simple rectangular structure are fabricated on three kind...
International audienceWe investigate thin film resistive thermometry based on metal-to-insulator-tra...
Barium lanthanum titanate-niobate (Ba1-xLaxNbyTi1-yO3) film deposited on a SiO2/Si substrate by the ...
Ba0.8Sr0.2TiO3 thin films deposited on a SiO2/Si substrate by argon ion-beam sputtering technique ar...
Nb-doped Sr 0.98La 0.02TiO 3 thin-film resistor is fabricated on a SiO 2/Si substrate by argon ion-b...
This paper reports the application of test structures to the evaluation of tantalum nitride (Ta-N) a...
The opposite signs of the temperature coefficient of resistance (TCR) of two thin film materials, ti...
Spreading-resistance temperature (SRT) sensor on thin-film SOI is investigated with emphasis on its ...
Strontium titanate-niobate (SrNbxTi1-xO3) film deposited on a SiO2/Si substrate by the argon ion-bea...
Titanium nitride (TiN) thin film resistors (TFRs) have been fabricated by reactive sputter depositio...
Strontium lanthanum titanate (Sr1-xLaxTiO3) film deposited on a SiO2/Si substrate by the argon ion-b...
International audienceStructural and dielectric properties of thin films produced by reactive radiof...
Strontium titanate-niobate (SrNbxTi1-xO3) film deposited on SiO2/Si substrate by argon ion-beam sput...
In this study, commercial-grade NiCr (80 wt % Ni, 20 wt % Cr) and NiCrSi (55 wt % Ni, 40 wt % Cr, 5 ...
This paper presents a comprehensive study of sputtered TaN thin film resistor with a low resistivity...
In this work, thermal resistors based on a simple rectangular structure are fabricated on three kind...
International audienceWe investigate thin film resistive thermometry based on metal-to-insulator-tra...
Barium lanthanum titanate-niobate (Ba1-xLaxNbyTi1-yO3) film deposited on a SiO2/Si substrate by the ...