A review of some of the work in tunable RF MEMS elements is presented. Discussed are a high-tuning range variable capacitor, a tunable microinductor, a switched inductor array and a MEMS capacitor immersed in a dielectric fluid. These devices expand the types of devices available to the RF designer for enhanced RF circuits. © 2004 IEEE.link_to_subscribed_fulltex
RF MEMS capacitive switches and tunable capacitors have been realized in an industrialized thin-film...
A high power continuously tunable RF-MEMS capacitor (varactor) for frequencies from DC-4.0 GHz is pr...
Abstract Recently, the application of MEMS technology in RF and microwave circuits has attracted sig...
International audienceThis paper outlines the capabilities of RF MEMS tunable microinductors designe...
()ABSTRACT: An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a...
Micromachining and RF Micro-Electro-Mechanical Systems (RF MEMS) have been identified as two of the ...
A tunable capacitor based on MEMS technology is presented in this paper. The proposed structure cons...
Abstract—This paper reports on a microfabrication technology for implementing high-performance passi...
Abstract. This paper reviews the recent progress in MEMS for radio frequency (RF) applications from ...
With fast development of mobile communication technology, the increasingly complex communicating env...
This paper presents a structure of MEMS capacitor providing independence of its nominal capacity and...
Several CMOS-MEMS tunable capacitors have been designed, fabricated and tested. Large-tuning ranges ...
Abstract—This paper reports on a microfabrication technology for implementing high-performance passi...
Abstract � In this paper, the recent progress of RF MEMS research for wireless/mobile communications...
This paper reports a MEMS tunable capacitor with a new actuation principle. The new design adopts el...
RF MEMS capacitive switches and tunable capacitors have been realized in an industrialized thin-film...
A high power continuously tunable RF-MEMS capacitor (varactor) for frequencies from DC-4.0 GHz is pr...
Abstract Recently, the application of MEMS technology in RF and microwave circuits has attracted sig...
International audienceThis paper outlines the capabilities of RF MEMS tunable microinductors designe...
()ABSTRACT: An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a...
Micromachining and RF Micro-Electro-Mechanical Systems (RF MEMS) have been identified as two of the ...
A tunable capacitor based on MEMS technology is presented in this paper. The proposed structure cons...
Abstract—This paper reports on a microfabrication technology for implementing high-performance passi...
Abstract. This paper reviews the recent progress in MEMS for radio frequency (RF) applications from ...
With fast development of mobile communication technology, the increasingly complex communicating env...
This paper presents a structure of MEMS capacitor providing independence of its nominal capacity and...
Several CMOS-MEMS tunable capacitors have been designed, fabricated and tested. Large-tuning ranges ...
Abstract—This paper reports on a microfabrication technology for implementing high-performance passi...
Abstract � In this paper, the recent progress of RF MEMS research for wireless/mobile communications...
This paper reports a MEMS tunable capacitor with a new actuation principle. The new design adopts el...
RF MEMS capacitive switches and tunable capacitors have been realized in an industrialized thin-film...
A high power continuously tunable RF-MEMS capacitor (varactor) for frequencies from DC-4.0 GHz is pr...
Abstract Recently, the application of MEMS technology in RF and microwave circuits has attracted sig...