Add to ORKGTwo types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 μm) ranges with submicron positioning.link_to_subscribed_fulltex
Quad-level polysilicon surface micromachining technology, comprising three mechanical levels plus an...
This work reports the design and opto-mechanical characterization of high velocity comb-drive actuat...
A fabrication technology based on polysilicon surface micromachining techniques and first actuator d...
Several authors have given overviews of microelectromechanical systems, including microactuators. In...
Several authors [1,2] have given overviews of microelectromechanical systems, including microactuato...
Actuated surface-micromachined polysilicon micromirrors for laser-beam positioning have been designe...
A compact polysilicon surface-micromachined microactuator designed for optical switching application...
We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining...
The design, fabrication, and potential performance of micro-actuated mirrors for beam steering are c...
A novel kind of torsion-mirror actuators with compound electrostatic driving structures is reported....
A novel electrostatically driven silicon Micro Scanning Mirror for one and two dimensional deflectio...
[[abstract]]Characteristics of motion and movement are key concerns for microactuators and microrobo...
A novel hybrid electrostatic actuator made up of a planar plate drive and a vertical comb drive is d...
AbstractA silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrat...
Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts ...
Quad-level polysilicon surface micromachining technology, comprising three mechanical levels plus an...
This work reports the design and opto-mechanical characterization of high velocity comb-drive actuat...
A fabrication technology based on polysilicon surface micromachining techniques and first actuator d...
Several authors have given overviews of microelectromechanical systems, including microactuators. In...
Several authors [1,2] have given overviews of microelectromechanical systems, including microactuato...
Actuated surface-micromachined polysilicon micromirrors for laser-beam positioning have been designe...
A compact polysilicon surface-micromachined microactuator designed for optical switching application...
We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining...
The design, fabrication, and potential performance of micro-actuated mirrors for beam steering are c...
A novel kind of torsion-mirror actuators with compound electrostatic driving structures is reported....
A novel electrostatically driven silicon Micro Scanning Mirror for one and two dimensional deflectio...
[[abstract]]Characteristics of motion and movement are key concerns for microactuators and microrobo...
A novel hybrid electrostatic actuator made up of a planar plate drive and a vertical comb drive is d...
AbstractA silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrat...
Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts ...
Quad-level polysilicon surface micromachining technology, comprising three mechanical levels plus an...
This work reports the design and opto-mechanical characterization of high velocity comb-drive actuat...
A fabrication technology based on polysilicon surface micromachining techniques and first actuator d...