We report here the first characterization of dielectric charging effects on Parylene electrostatic actuators. High-resistivity Parylene in-between air gaps can cause undesirable charging effects due to air ionization when operating as electrostatic sensors/actuators at voltages as low as tens of volts. This undesirable effect can either lower the sensitivity of the sensor or increase the pull-in voltage of the actuator. It is further observed that Parylene actuators operating at high voltage could even show "bounce-back" and "pull-in voltage drift" problems. It is concluded that even for MEMS, attention must be paid to the operating voltages and the resistivity of the dielectrics
Abstract Surface dielectric barrier discharges are investigated in order to explore t...
Purpose To investigate the influence of different actuator nozzle designs on aerosol electrostatic c...
A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT...
We report here the first characterization of dielectric charging effects on Parylene electrostatic a...
This work reports the design, fabrication, testing and modeling of electrolysis-based fully encapsul...
n electret power generator is developed using a new electret made of a charged parylene HT® thin-fil...
As dictated by the International Technology Roadmap for Semiconductors, there is an immediate need t...
This paper presents analysis and implementation of a simple electrostatic microvalve designed for us...
[[abstract]]This study presents a novel diaphragm type thermo- buckled microactuator with only a dri...
In order to track a specific neuron and keep good sampling neural signals during chronic implantatio...
Abstract Using the SEM analysis technique, we present the first direct evidences of the non-uniform...
Voltage-driven parallel-plate electrostatic actuators suffer from an operation range limit of 30% of...
This paper investigates both theoretically and experimentally the dielectric charging effects of cap...
International audienceDielectric charging is a key failure mechanism in radio frequency (RF) microel...
The operational range of MEMS electrostatic parallel plate actuators can be extended beyond pull-in ...
Abstract Surface dielectric barrier discharges are investigated in order to explore t...
Purpose To investigate the influence of different actuator nozzle designs on aerosol electrostatic c...
A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT...
We report here the first characterization of dielectric charging effects on Parylene electrostatic a...
This work reports the design, fabrication, testing and modeling of electrolysis-based fully encapsul...
n electret power generator is developed using a new electret made of a charged parylene HT® thin-fil...
As dictated by the International Technology Roadmap for Semiconductors, there is an immediate need t...
This paper presents analysis and implementation of a simple electrostatic microvalve designed for us...
[[abstract]]This study presents a novel diaphragm type thermo- buckled microactuator with only a dri...
In order to track a specific neuron and keep good sampling neural signals during chronic implantatio...
Abstract Using the SEM analysis technique, we present the first direct evidences of the non-uniform...
Voltage-driven parallel-plate electrostatic actuators suffer from an operation range limit of 30% of...
This paper investigates both theoretically and experimentally the dielectric charging effects of cap...
International audienceDielectric charging is a key failure mechanism in radio frequency (RF) microel...
The operational range of MEMS electrostatic parallel plate actuators can be extended beyond pull-in ...
Abstract Surface dielectric barrier discharges are investigated in order to explore t...
Purpose To investigate the influence of different actuator nozzle designs on aerosol electrostatic c...
A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT...