Line-Focus Acoustic Mcroscopy Measurements of Thin-Film Elastic Constants

Thin film materials are widely used as hard, protective coatings for softer surfaces. It is known that fracture strength and hardness are related to the elastic and plastic properties [1]. The elastic constants of the film deposited on a substrate are, however, difficult to measure. By a technique which was recently discussed [2] the elastic constants of amorphous (isotropic) films and single-crystal (anisotropic) films can be obtained by measuring the velocities of surface acoustic waves (SAWs) propagating over a thin-film/ substrate specimen by the use of a line-focus acoustic microscope