Ku Band High-Q Tunable Surface-Mounted Cavity Resonator Using RF MEMS Varactors

This paper presents a 14 GHz high-Q (quality factor) tunable resonator using microelectromechanical system (MEMS) varactors. A brass surface mountable cavity has been bonded on a fused silica wafer on which are processed three 1.1 mm long MEMS varactors. Their location has been optimized in order to obtain a wide frequency shift, when the cantilevers are actuated on the substrate. 15% tuning range from 11.9 GHz to 14.2 GHz has been obtained with a continuous shift from 11.9 GHz to 13.6 GHz. Measurements result in an average unloaded quality factor (Q(u)) of 480 over the operating frequency band.This work was supported by the Agence Nationale Recherche (ANR) project Filipix.Stefanini, R.; Martínez Pérez, JD.; Chatras, M.; Pothier, A.; Boria Esbert, VE.; Blondy, P. (2011). Ku Band High-Q Tunable Surface-Mounted Cavity Resonator Using RF MEMS Varactors. IEEE Microwave and Wireless Components Letters. 21(5):237-239. doi:10.1109/LMWC.2011.2126565S23723921