Electrical and optical properties of tin oxide films doped with F and (Sb+F)

This paper presents the structural, electrical, and optical properties of F- and (Sb+F)-doped tin oxide films prepared by spray pyrolysis technique. Resistivity as low as 5.5×10-4 Ωcm with high optical transmission (≥80%) and high infrared reflection (∼90%) have been obtained in F-doped tin oxide films. The figure of merit ΦTC = T10/Rsh (52.6×10-3Ω-1 at 0.65μm) of these films is the highest amongst the results reported on doped tin oxide films. The variation of mobility with doping concentration has been analyzed to understand the electron-conduction mechanism. The Drude theory has been used to explain the optical properties near the plasma edge