DOIAbstract
The effects of donor impurities such as antimony, fluorine and antimony plus fluorine on the structural, electrical and optical properties of tin oxide films prepared by spray pyrolysis have been studied. The dopant concentration in the films, as determined by Auger analysis, is less than that in the solution. The mobility of free carriers in doped tin oxide films is found to depend on the nature and the concentration of the dopant. Fluorine doping of tin oxide films results in the highest conductivity and the highest optical transmission in the visible region
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