MEMS céramiques piézoélectriques imprimés pour la récupération d’énergie : Vers un frittage SPS du multicouches.

An emerging application for piezoelectric MEMS (Micro-Electromechanical Systems) concerns the harvesting of mechanical vibratory energy. The fabrication of these piezoelectric MEMS in thick screen printed layers is an attractive low-cost approach. For MEMS energy harvesting applications, thick layers (1-100µm) are an attractive alternative to thin layers to maximize electromechanical coupling. Furthermore, the replacement of MEMS passive silicon substrates with more flexible metal substrates is also expected to improve performance. However, printed piezoelectric thick films maintain a residual porosity that is detrimental to the piezoelectric properties. The objective of this thesis is to develop a resonant mechanical energy harvester (frequency