Electric and magnetic properties of atomic layer deposited ZrO2-HfO2 thin films

Producción CientíficaAtomic layer deposition method was employed to deposit thin films consisting of ZrO2 and HfO2. Zirconia films were doped with hafnia and vice versa, and also nanolaminates were formed. All depositions were carried out at 300°C. Most films were crystalline in their as-deposited state. Zirconia exhibited the metastable cubic and tetragonal phases by a large majority, whereas hafnia was mostly in its stable monoclinic phase. Magnetic and electrical properties of the films were assessed. Un-doped zirconia was ferromagnetic and this property diminished with increasing the amount of hafnia in a film. All films exhibited ferroelectric-like behavior and the polarization curves also changed with respect to the film composition.Fondo Europeo de Desarrollo Regional (project TK134)Ministerio de Economía, Industria y Competitividad (grant TEC2017-84321-C4-2-R)Estonian Research Agency (grants IUT2-24 and PRG4