Characterization of CrAlN Films Synthesized by DC Reactive Magnetron Sputtering

CrAlN films were synthesized by DC reactive magnetron sputtering. The influence of the aluminium content on the microstructure, hardness and the friction coefficient of the CrAlN films have been investigated. Results indicate that all CrAlN coatings present a columnar and dense structure. Also, CrAlN coatings present a better hardness than CrN coating. The increase of Al rate from 3.5 to 11% is accompanied by a decrease of hardness from 28 to 24 GPa and then it increases for an Al rate of 24%. The addition of Al to the CrN system causes an increase of the friction coefficient and the wear resistance.Conseil Régional de Bourgogn