Biosensor based on a MOS capacitor with an internal reference electrode

In this project a new type of metal oxide semiconductor (MOS) sensor for biosensing was investigated. With the use of a porous gold film as aninternal reference electrode, measurements of pH were performed in liquid. This new approach for liquid measurements demands new methods andstudies to increase the conductivity and adhesion in liquid of the porous gold film. The films have been deposited, either by sputtering orevaporation. Extensive studies included the investigation of depositions parameters on film structure and investigating the film morphology. Thesurface structure was studied with a scanning electron microscope (SEM). pH measurements were preformed with promising results. The adhesionof the electrode was greatly improved by using grains of titanium underneath the gold film. This new approach could lead to new applications anddevices for MOS sensors and its sensor relatives