A few deg/hr resolvable low noise lateral microgyroscope

ABSTRACT 4.68°/hr equivalent noise level microgyroscope is fabricated and tested with a conventional electronic circuits on PCB (Printed Circuit Board). The rate resolution is improved by reduced noise with field coupling compensation and large oscillation amplitude of driven mode. Unbalanced capacitance variation by fringing field is compensated with mirrored anchor structure. Driven oscillation with enhanced amplitude is mechanically decoupled using folded spring structure, which is independent of the oscillation of sensed mode. The sensing electronic circuit is realized on PCB using DIP IC, and the capacitance variation in the range of attofarad is proved through the driven and sensed mode measurement. Fabricated gyroscope was tested applying 0.01°/sec amplitude with 1 sinusoidal input, and showed an equivalent noise level of 4.68°/hr (0.0013°/sec). The microgyroscope is characterized by a linearity error of less than 0.8% FSO for a measured range of 200°/sec