Mathematical Modeling of High Energy Plasma Technologies with Account for some of the Fundamental Problems

This paper discusses some of the fundamental problems of mathematical modelling of coating processes using vacuum ion-plasma method. It introduces the concept of active surface zone to describe non-thermal activation processes proving that non-thermal surface activation processes can be explained based on the effect of surface focusers. The main stages of adsorbed particles' evolution are described based on the concepts of probability theory. The paper refines some of rather general theoretical ratios used in the theory of new phase formation on the solid body surface