Application of HWCVD for material development in solar energy research

We will report on the development and application of the Hot Wire Chemical Vapor Deposition technology in solar energy research at the Forschungszentrum Jülich. Over the years we have focused on preparation of microcrystalline silicon and microcrystalline silicon-carbon alloys and we have applied these materials in thin film silicon based solar. We have further applied the HWCVD technology for treatment of interfaces in solar cells and for hydrogen passivation of materials. While so far the focus was on thin film solar cells, recently we have shifted some activities to silicon heterojunction solar cells. Besides we have been interested in developing further the HWCVD system design for more flexibility and dedicated functionality. In our presentation we will show some highlight of our research activities