A new EC funded project EMMA, ElectroMechanical Microcomponents for Precision Applications, has started recently. The aim of the project is to develop micromecanical capacitive transducers suitable for electricity metrology. An ac and a dc voltage reference, an AC/DC converter, and a low frequency voltage divider have been demonstrated already and will be elaborated further in the project. A promising new field is to study MEMS transducers in high frequency applications
Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These powe...
Voltage references are fundamental building blocks in many instruments like data logging systems, di...
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Compute...
Microelectromechanical systems (MEMS) will have an important role in metrology. The essential featur...
Microelectromechanical systems (MEMS) have been recently proposed for realizing several references i...
Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric i...
AbstractWe present sensors for electrical DC and RF voltage measurements employing the principle of ...
The design and characterization of a high stability capacitive MEMS device intended for an AC voltag...
A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is...
With the increased usage of microelectromechanical devices (MEMs) today, the use and design of syste...
Abstract: Micro-electromechanical systems (MEMS) are free scale’s enabling technology for accelerati...
A micromechanical moving plate capacitor has been designed and fabricated for use as the key compone...
Abstrac t – This work explores the MEMS potentialities to fabricate flexible AC voltage references ...
A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage re...
A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is...
Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These powe...
Voltage references are fundamental building blocks in many instruments like data logging systems, di...
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Compute...
Microelectromechanical systems (MEMS) will have an important role in metrology. The essential featur...
Microelectromechanical systems (MEMS) have been recently proposed for realizing several references i...
Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric i...
AbstractWe present sensors for electrical DC and RF voltage measurements employing the principle of ...
The design and characterization of a high stability capacitive MEMS device intended for an AC voltag...
A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is...
With the increased usage of microelectromechanical devices (MEMs) today, the use and design of syste...
Abstract: Micro-electromechanical systems (MEMS) are free scale’s enabling technology for accelerati...
A micromechanical moving plate capacitor has been designed and fabricated for use as the key compone...
Abstrac t – This work explores the MEMS potentialities to fabricate flexible AC voltage references ...
A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage re...
A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is...
Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These powe...
Voltage references are fundamental building blocks in many instruments like data logging systems, di...
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Compute...