Large Area 2D Electronic Molecular Sensor Arrays via Photonic Annealing of Amorphous Sputtered Mos2

Development of sensitive and selective electronic molecular sensors is an area of interest for healthcare, industrial safety, law enforcement, national security, and human performance applications. Electronic sensors demonstrate potential benefits of portability, low power consumption, quick response times, and high sensitivity. Two-dimensional transition metal dichalcogenides (2D TMDs) have the potential to revolutionize electronic chemical sensing due to the unique combination of physical, mechanical, and electronic characteristics they possess. However, scaling up 2D TMD materials synthesis for devices remains a major obstacle in realizing their benefits in applications such as molecular sensing. In this work, a novel sensor fabrication technique using photonic annealing of amorphous MoS2 sputtered over large areas \u3e1cm2 is investigated. Sensors for detection of NH3, NO2, methacrolein, and water vapors are demonstrated. Correlations of device sensitivity to the structure and properties of the 2D TMD transducer are presented. The sensor devices fabricated on the centimeter scale with this novel technique demonstrate performance comparable to traditional nanoscale devices, yet, are amenable for commercialization and utilization in application areas of interest