Decomposition routes and strain evolution in arc deposited TiZrAlN coatings

Phase, microstructure, and strain evolution during annealing of arc deposited TiZrAlN coatings are studied using in situ x-ray scattering and ex situ transmission electron microscopy. We find that the decomposition route changes from nucleation and growth of wurtzite AlN to spinodal decomposition when the Zr-content is decreased and the Al-content increases. Decomposition of Ti0.31Zr0.24Al0.45N results in homogeneously distributed wurtzite AlN grains in a cubic, dislocation-dense matrix of TiZrN consisting of domains of different chemical composition. The combination of high dislocation density, variation of chemical composition within the cubic grains, and evenly distributed wurtzite AlN grains results in high compressive strains, -1.1%, which are retained after 3 h at 1100 degrees C. In coatings with higher Zr-content, the strains relax during annealing above 900 degrees C due to grain growth and defect annihilation. (C) 2018 Elsevier B.V. All rights reserved.Funding Agencies|VINNOVA (Swedish Governmental Agency for Innovation Systems) [2016-05156]; Swedish Government Strategic Research Area (SFO Mat LiU) [2009 00971]; Swedish Research Council [2017-03813]; Rontgen-Angstrom Cluster frame grants [VR 2011-6505, VR 2017-06701]